Kentax UHV equipment
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TCE-S (4 - cell + shutter)

This evaporator contains four heater cells inside which are identical to the other products. The TCE-S evaporator is equipped with a shutter that allows instant stopping of the coating process.

Due to the need of two flanges backside for electrical- and rotary- feed through, a Flange Multiplexer is used.

This version can easily be upgraded by the z-travel unit. Due to another free CF16 flange backside for pumping down, the TCE-S evaporator can be Locked In/Out.

TCE-BS (4 - cell + shutter + retractable)

The TCE-BS is the complete version of the 4-cell evaporator. Equipped with a corner- and gate- valve, four materials can be exchanged without breaking the vacuum of the main chamber.

Data sheets

The following data sheets show temperature curves of one driven heater element whereas the other three elements are not heated but recorded in their temperature. From these diagrams you can see how long a crucible can be heated before the neighboring crucible (with its material) reaches the maximum allowed temperature.


Temperature curves from 50 - 650 °C.

The diagram shows the thermal characteristic of the four cells, if one cell is heating. The cell on the opposite site of the heated cell indicate the lowest crosstalk.

50 °C
  150 °C
  250 °C
  350 °C

450 °C
  550 °C
  650 °C

Temperature curves at different final temperatures from T set value 50 °C, 150 °C , 250 °C, 350 °C, 450 °C, 550 °C and 650 °C.

PDF-File: All data sheets in one PDF file: data-sheets-kentax.pdf (new window)

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