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UHV-Manipulator Heads

At first, we show three different kinds of manipulator heads. The first one is described in more detail


Large area manipulator head for semiconductor Preparation 20 mm x 30 mm and fixing of an additional sample on top by two electrodes

Omicron compatible head for direct heating of semiconductors as well as with IR radiation and e-emission heating (sample sizes up to 10 mm x 10 mm)

Special double holder for two samples with cooling tank and sputter ability from the reverse side (sample sizes up to 10 mm x 10 mm)

The manipulator head for large area samples allows preparation by direct heating (up to 1200 °C) and IR radiation by a filament. Temperature measurement is carried out by thermocouple Type K (one behind the sample and one optional). Exact sample temperature can be measured from the reverse side by Pyrometer.


Details of the manipulator head without the two tungsten electrodes on top.
Holder in vacuum but without sample


UHV Manipulator Head

Possibilities of heating of the sample: